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Microelectronic engineering

Verlag

Elsevier

URL

https://ld.zdb-services.de/resource/1497065-X

ZDBID

1497065-X

MOS-Compatible Fabrication and Characterization of Tunnel Junctions in BESOI-Material
Step edge cut off - A new fabrication process for metal-based single electron devices

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MOS-Compatible Fabrication and Characterization of Tunnel Junctions in BESOI-Material
Step edge cut off - A new fabrication process for metal-based single electron devices

Download
RDF/XML-Format
JSON-LD-Format
Turtle-Format
N3-Format