Journal of vacuum science and technology

• Novel approach to atomic force lithography
• Fabrication of Silicon and Metal Nanowires and Dots Using Mechanical Atomic Force Lithography
• Direct Patterning of Single Electron Tunneling Transistors by High Resolution Electron Beam Lithography on Highly Doped Molecular Beam Epitaxy Grown Silicon Films
• Metal-Oxide-Semiconductor-Compatible Silicon Based Single Electron Transistor Using Bonded and Etched Back Silicon on Insulator Material
• Metal Based Single Electron Transistors Operating at Several Kelvin

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